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Proceedings Paper

Absolute surface form measurement of large flat optics based on oblique incidence method
Author(s): Shijie Liu; Longbo Xu; You Zhou; Shi Men; Yunbo Bai; Xueke Xu; Jianda Shao
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Paper Abstract

In this paper, a test method based on oblique incidence is practically implemented in the interferometric measurement process. Three sets of wavefront data are achieved through cavity interference measurement with a Fizeau interferometer and one oblique incidence measurement. An iterative algorithm is applied to retrieve the matrix of transmission flatness and reference flatness. The new method can not only calibrate the reference flat error of large aperture interferometer, but also provide the absolute measurement method for large rectangular optical components applied in high power laser systems.

Paper Details

Date Published: 14 November 2017
PDF: 7 pages
Proc. SPIE 10448, Optifab 2017, 104481J (14 November 2017); doi: 10.1117/12.2279873
Show Author Affiliations
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Longbo Xu, Nanjing Univ. of Science and Technology (China)
You Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Shi Men, Nanjing Univ. of Science and Technology (China)
Yunbo Bai, Shanghai Institute of Optics and Fine Mechanics (China)
Xueke Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 10448:
Optifab 2017
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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