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Proceedings Paper

Enhanced resolution and accuracy of freeform metrology through Subaperture Stitching Interferometry
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Paper Abstract

Recent advances in polishing and metrology have addressed many of the challenges in the fabrication and metrology of freeform surfaces, and the manufacture of these surfaces is possible today. However, achieving the form and mid-spatial frequency (MSF) specifications that are typical of visible imaging systems remains a challenge. Interferometric metrology for freeform surfaces is thus highly desirable for such applications, but the capability is currently quite limited for freeforms. In this paper, we provide preliminary results that demonstrate accurate, high-resolution measurements of freeform surfaces using prototype software on QED’s ASI™ (Aspheric Stitching Interferometer).

Paper Details

Date Published: 16 October 2017
PDF: 8 pages
Proc. SPIE 10448, Optifab 2017, 1044818 (16 October 2017); doi: 10.1117/12.2279821
Show Author Affiliations
Chris Supranowitz, QED Technologies, Inc. (United States)
Chris Maloney, QED Technologies, Inc. (United States)
Paul Murphy, QED Technologies, Inc. (United States)
Paul Dumas, QED Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 10448:
Optifab 2017
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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