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Proceedings Paper

SUN: A fully automated interferometric test bench aimed at measuring photolithographic grade lenses with a sub nanometer accuracy
Author(s): R. Bourgois; A. L. Hamy; P. Pourcelot
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Paper Abstract

SUN is a test bench developed by Safran Reosc to measure spherical or aspherical surface errors of litho-grade lenses with sub-nanometer accuracy. SUN provides full aperture high resolution interferometric measurements. Measurements are performed at the center of curvature using high precision transmission sphere (TS), and Computer Generated Holograms (CGH) for aspheres, in order to light the surface at normal incidence. SUN can measure lenses with diameter up to 350mm and a radius of curvature varying from 60 to 3000 mm.

Paper Details

Date Published: 16 October 2017
PDF: 14 pages
Proc. SPIE 10448, Optifab 2017, 104481E (16 October 2017); doi: 10.1117/12.2279789
Show Author Affiliations
R. Bourgois, Safran Reosc (France)
A. L. Hamy, Safran Reosc (France)
P. Pourcelot, Safran Reosc (France)

Published in SPIE Proceedings Vol. 10448:
Optifab 2017
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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