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Proceedings Paper

Way to nanogrinding technology
Author(s): Masakazu Miyashita
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Paper Abstract

Precision finishing process of hard and brittle material components such as single crystal silicon wafer and magnetic head consists of lapping and polishing which depend too much on skilled labor. This process is based on the traditional optical production technology and entirely different from the automated mass production technique in automobile production. Instead of traditional lapping and polishing, the nanogrinding is proposed as a new stock removal machining to generate optical surface on brittle materials. By this new technology, the damage free surface which is the same one produced by lapping and polishing can be obtained on brittle materials, and the free carvature can also be generated on brittle materials. This technology is based on the motion copying principle which is the same as in case of metal parts machining. The new nanogrinding technology is anticipated to be adapted as the machining technique suitable for automated mass production, because the stable machining on the level of optical production technique is expected to be obtained by the traditional lapping and polishing.

Paper Details

Date Published: 1 November 1990
PDF: 15 pages
Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); doi: 10.1117/12.22785
Show Author Affiliations
Masakazu Miyashita, Ashikaga Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 1333:
Advanced Optical Manufacturing and Testing
Gregory M. Sanger; Paul B. Reid; Lionel R. Baker, Editor(s)

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