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Proceedings Paper • Open Access

3D laser nanolithography (Conference Presentation)
Author(s): Martin Wegener

Paper Abstract

Three-dimensional (3D) laser lithography has become a versatile, reliable, and widespread workhorse for fabricating 3D micro- and nanostructures. I will illustrate the current state-of-the-art by selected examples, including free-form micro-optics, 3D optical and other metamaterials, as well as functionalized 3D scaffolds for biological cell culture. I will speculate about near-term industrial applications and outline remaining technological challenges regarding spatial resolution, scalability, and multi-material 3D nano-printing.

Paper Details

Date Published: 20 September 2017
Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 1035402 (20 September 2017); doi: 10.1117/12.2276877
Show Author Affiliations
Martin Wegener, Karlsruher Institut für Technologie (Germany)

Published in SPIE Proceedings Vol. 10354:
Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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