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Proceedings Paper

Mastering multi-depth bio-chip patterns with DVD LBRs
Author(s): Doug Carson
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Paper Abstract

Bio chip and bio disc are rapidly growing technologies used in medical, health and other industries. While there are numerous unique designs and features, these products all rely on precise three-dimensional micro-fluidic channels or arrays to move, separate and combine samples under test. These bio chip and bio disc consumables are typically manufactured by molding these parts to a precise three-dimensional pattern on a negative metal stamper, or they can be made in smaller quantities using an appropriate curable resin and a negative mold/stamper. Stampers required for bio chips have been traditionally made using either micro machining or XY stepping lithography. Both of these technologies have their advantages as well as limitations when it comes to creating micro-fluidic patterns. Significant breakthroughs in continuous maskless lithography have enabled accurate and efficient manufacturing of micro-fluidic masters using LBRs (Laser Beam Recorders) and DRIE (Deep Reactive Ion Etching). The important advantages of LBR continuous lithography vs. XY stepping lithography and micro machining are speed and cost. LBR based continuous lithography is >100x faster than XY stepping lithography and more accurate than micro machining. Several innovations were required in order to create multi-depth patterns with sub micron accuracy. By combining proven industrial LBRs with DCA’s G3-VIA pattern generator and DRIE, three-dimensional bio chip masters and stampers are being manufactured efficiently and accurately.

Paper Details

Date Published: 23 August 2017
PDF: 6 pages
Proc. SPIE 10384, Optical Data Storage 2017: From New Materials to New Systems, 103840H (23 August 2017); doi: 10.1117/12.2275818
Show Author Affiliations
Doug Carson, DCA, Inc. (United States)

Published in SPIE Proceedings Vol. 10384:
Optical Data Storage 2017: From New Materials to New Systems
Ryuichi Katayama; Yuzuru Takashima, Editor(s)

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