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Proceedings Paper

Recent developments in nanoradian-angle metrology
Author(s): Tanfer Yandayan
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Paper Abstract

An angle metrology project (SIB58 Angles) addressing the challenging issues related to performance of autocollimators in slope measuring profilers run for three years and was completed recently with cooperation of a wide range of partners. Outcomes of the project which are for interest to the X-ray optics community are presented; new aperture centring device (ACenD) for the accurate centring of a beam-limiting aperture in front of an autocollimator (with a positional accuracy of ±0.1 mm), performance of autocollimators with varying distances to reflector at small apertures, developed guides for calibration of autocollimators and reference angle encoders, first 2D calibration of autocollimators, new devices and novel methods for traceable generation and measurement of angles at nanoradian precision.

Paper Details

Date Published: 7 September 2017
PDF: 14 pages
Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 1038509 (7 September 2017); doi: 10.1117/12.2274192
Show Author Affiliations
Tanfer Yandayan, TÜBITAK UME (Turkey)

Published in SPIE Proceedings Vol. 10385:
Advances in Metrology for X-Ray and EUV Optics VII
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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