A portable device has been developed in TUBITAK UME to calibrate high precision autocollimators with nanoradian precision. The device can operate in the range of ±4500" which is far enough for the calibration of the available autocollimators and can generate ultra-small angles in measurement steps of 0.0005" (2.5 nrad). Description of the device with the performance tests using the calibrated precise autocollimators and novel methods will be reported. The test results indicate that the device is a good candidate for application to on-site/in-situ calibration of autocollimators with expanded uncertainties of 0.01" (50 nrad) particularly those used in slope measuring profilers.

Date Published: 7 September 2017
PDF: 11 pages
Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850B (7 September 2017); doi: 10.1117/12.2274178

Published in SPIE Proceedings Vol. 10385:
Advances in Metrology for X-Ray and EUV Optics VII
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)