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Proceedings Paper

A new optics metrology laboratory at CNPEM: metrology capabilities, performance, and future plans
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Paper Abstract

A new metrology and assembly facility was constructed at CNPEM and turned recently into operation. The facility includes an assembly area of 100 m2, a high-precision mechanical metrology laboratory and an optical metrology laboratory (OML), both of 50 m2, and provide improved environmental and instrumental conditions. All three laboratories sit on inertial blocks with special foundations originally developed and tested as prototype for the SIRIUS tunnel floor. The inertial blocks perform very well in attenuation of external vibrations. The OML is cleanroom ISO7 and has temperature stability better than ±0.1 K. Measurements of the surface under test (SUT) using NOM, Fizeau- Interferometer (FI), Micro-Interferometer (MI) and AFM as the four instruments inside the OML cover the full required range of spatial frequencies. We report on the performance of the NOM and FI, the first instruments installed in the OML.

Paper Details

Date Published: 7 September 2017
PDF: 7 pages
Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850C (7 September 2017); doi: 10.1117/12.2274020
Show Author Affiliations
Bernd C. Meyer, Ctr. Nacional de Pesquisa em Energia e Materiais (Brazil)
Murilo B. da Silva, Ctr. Nacional de Pesquisa em Energia e Materiais (Brazil)

Published in SPIE Proceedings Vol. 10385:
Advances in Metrology for X-Ray and EUV Optics VII
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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