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Proceedings Paper

PtyNAMi: ptychographic nano-analytical microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector
Author(s): Christian G. Schroer; Martin Seyrich; Maik Kahnt; Stephan Botta; Ralph Döhrmann; Gerald Falkenberg; Jan Garrevoet; Mikhail Lyubomirskiy; Maria Scholz; Andreas Schropp; Felix Wittwer
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Paper Abstract

In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

Paper Details

Date Published: 7 September 2017
PDF: 10 pages
Proc. SPIE 10389, X-Ray Nanoimaging: Instruments and Methods III, 103890E (7 September 2017); doi: 10.1117/12.2273710
Show Author Affiliations
Christian G. Schroer, Deutsches Elektronen-Synchrotron (Germany)
Univ. Hamburg (Germany)
Martin Seyrich, Deutsches Elektronen-Synchrotron (Germany)
Univ. Hamburg (Germany)
Maik Kahnt, Deutsches Elektronen-Synchrotron (Germany)
Univ. Hamburg (Germany)
Stephan Botta, Deutsches Elektronen-Synchrotron (Germany)
Ralph Döhrmann, Deutsches Elektronen-Synchrotron (Germany)
Gerald Falkenberg, Deutsches Elektronen-Synchrotron (Germany)
Jan Garrevoet, Deutsches Elektronen-Synchrotron (Germany)
Mikhail Lyubomirskiy, Deutsches Elektronen-Synchrotron (Germany)
Maria Scholz, Deutsches Elektronen-Synchrotron (Germany)
Univ. Hamburg (Germany)
Andreas Schropp, Deutsches Elektronen-Synchrotron (Germany)
Felix Wittwer, Deutsches Elektronen-Synchrotron (Germany)
Univ. Hamburg (Germany)


Published in SPIE Proceedings Vol. 10389:
X-Ray Nanoimaging: Instruments and Methods III
Barry Lai; Andrea Somogyi, Editor(s)

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