Share Email Print
cover

Proceedings Paper

Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering
Author(s): Jing Wu; Zhiming Huang; Lin Jiang; Yanqing Gao; Wei Zhou; Junhao Chu
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Mn-Co-Ni-O (MCNO) flexible thermistors are fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes is completed at room temperature. The temperature coefficient of resistance (TCR) is -3.1% and resistivity as low as 110Ωcm at 295K. The bendingstraightening cycle test indicates the flexible MCNO sheet is stable. The temperature sensing test shows the thermistors respond to temperature change rapidly and sensitively. Due to the heat-treat free process, high TCR and moderate resistivity features, the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.

Paper Details

Date Published: 30 August 2017
PDF: 6 pages
Proc. SPIE 10403, Infrared Remote Sensing and Instrumentation XXV, 104030C (30 August 2017); doi: 10.1117/12.2273255
Show Author Affiliations
Jing Wu, Shanghai Institute of Technical Physics (China)
Zhiming Huang, Shanghai Institute of Technical Physics (China)
Lin Jiang, Shanghai Institute of Technical Physics (China)
Yanqing Gao, Shanghai Institute of Technical Physics (China)
Wei Zhou, Shanghai Institute of Technical Physics (China)
Junhao Chu, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 10403:
Infrared Remote Sensing and Instrumentation XXV
Marija Strojnik; Maureen S. Kirk, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray