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Proceedings Paper

General testing method for refractive surfaces based on reverse Hartmann test
Author(s): Ping Xu; Daodang Wang; Zhidong Gong; Zhongmin Xie; Rongguang Liang; Ming Kong; Jun Zhao; Linhai Mo; Shuhui Mo
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Paper Abstract

The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.

Paper Details

Date Published: 23 August 2017
PDF: 8 pages
Proc. SPIE 10373, Applied Optical Metrology II, 103730J (23 August 2017); doi: 10.1117/12.2273189
Show Author Affiliations
Ping Xu, China Jiliang Univ. (China)
Daodang Wang, China Jiliang Univ. (China)
Zhidong Gong, China Jiliang Univ. (China)
Zhongmin Xie, China Jiliang Univ. (China)
Rongguang Liang, College of Optical Sciences, The Univ. of Arizona (United States)
Ming Kong, China Jiliang Univ. (China)
Jun Zhao, China Jiliang Univ. (China)
Linhai Mo, Volkslift Co. Ltd. (China)
Shuhui Mo, Volkslift Co. Ltd. (China)

Published in SPIE Proceedings Vol. 10373:
Applied Optical Metrology II
Erik Novak; James D. Trolinger, Editor(s)

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