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Proceedings Paper

Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry
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Paper Abstract

We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.

Paper Details

Date Published: 7 September 2017
PDF: 13 pages
Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 1038506 (7 September 2017); doi: 10.1117/12.2272616
Show Author Affiliations
Samuel Gleason, Inprentus, Inc. (United States)
Jonathan Manton, Inprentus, Inc. (United States)
Janet Sheung, Inprentus, Inc. (United States)
Taylor Byrum, Inprentus, Inc. (United States)
Cody Jensen, Inprentus, Inc. (United States)
Lingyun Jiang, Inprentus, Inc. (United States)
Joseph Dvorak, Brookhaven National Lab. (United States)
Ignace Jarrige, Brookhaven National Lab. (United States)
Peter Abbamonte, Inprentus, Inc. (United States)
Univ. of Illinois at Urbana-Champaign (United States)

Published in SPIE Proceedings Vol. 10385:
Advances in Metrology for X-Ray and EUV Optics VII
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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