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Proceedings Paper

Vibration isolation and damping in high precision equipment
Author(s): B. Bukkems; T. Ruijl; J. Simons
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Paper Abstract

All systems located in a laboratory environment or factory are subject to disturbances. These disturbances can either come from the surroundings, e.g. floor-induced vibrations, or from the system itself, e.g. stage-induced vibrations. In many cases it is needed to minimize the effect of these disturbances. This can either be done by isolating the system from its disturbance source or by applying damping to the system. In this paper we present various cases in which we have effectively reduced the impact of disturbances on the system’s performance, either by improving its isolation system, by minimizing the impact of stage reaction forces, or by designing polymer damping into the system.

Paper Details

Date Published: 15 June 2017
PDF: 5 pages
Proc. SPIE 10326, Fourth European Seminar on Precision Optics Manufacturing, 103260D (15 June 2017); doi: 10.1117/12.2272166
Show Author Affiliations
B. Bukkems, MI-Partners BV (Netherlands)
T. Ruijl, MI-Partners BV (Netherlands)
J. Simons, MI-Partners BV (Netherlands)

Published in SPIE Proceedings Vol. 10326:
Fourth European Seminar on Precision Optics Manufacturing
Oliver W. Fähnle; Rolf Rascher; Christine Wünsche, Editor(s)

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