
Proceedings Paper
Evaluation of laser ablation crater relief by white light micro interferometerFormat | Member Price | Non-Member Price |
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Paper Abstract
A multi-view scanning method is suggested to assess a complicated surface relief by white light interferometer.
Peculiarities of the method are demonstrated on a special object in the form of quadrangular pyramid cavity, which is
formed at measurement of micro-hardness of materials using a hardness gauge. An algorithm of the joint processing of
multi-view scanning results is developed that allows recovering correct relief values. Laser ablation craters were studied
experimentally, and their relief was recovered using the developed method. It is shown that the multi-view scanning
reduces ambiguity when determining the local depth of the laser ablation craters micro relief. Results of experimental
studies of the multi-view scanning method and data processing algorithm are presented.
Paper Details
Date Published: 26 June 2017
PDF: 8 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103294I (26 June 2017); doi: 10.1117/12.2272022
Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)
PDF: 8 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103294I (26 June 2017); doi: 10.1117/12.2272022
Show Author Affiliations
Igor Gurov, ITMO Univ. (Russian Federation)
Mikhail Volkov, ITMO Univ. (Russian Federation)
Ekaterina Zhukova, ITMO Univ. (Russian Federation)
Nikita Ivanov, ITMO Univ. (Russian Federation)
Mikhail Volkov, ITMO Univ. (Russian Federation)
Ekaterina Zhukova, ITMO Univ. (Russian Federation)
Nikita Ivanov, ITMO Univ. (Russian Federation)
Nikita Margaryants, ITMO Univ. (Russian Federation)
Andrey Potemkin, ITMO Univ. (Russian Federation)
Andrey Samokhvalov, ITMO Univ. (Russian Federation)
Svetlana Shelygina, ITMO Univ. (Russian Federation)
Andrey Potemkin, ITMO Univ. (Russian Federation)
Andrey Samokhvalov, ITMO Univ. (Russian Federation)
Svetlana Shelygina, ITMO Univ. (Russian Federation)
Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)
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