A multi-view scanning method is suggested to assess a complicated surface relief by white light interferometer. Peculiarities of the method are demonstrated on a special object in the form of quadrangular pyramid cavity, which is formed at measurement of micro-hardness of materials using a hardness gauge. An algorithm of the joint processing of multi-view scanning results is developed that allows recovering correct relief values. Laser ablation craters were studied experimentally, and their relief was recovered using the developed method. It is shown that the multi-view scanning reduces ambiguity when determining the local depth of the laser ablation craters micro relief. Results of experimental studies of the multi-view scanning method and data processing algorithm are presented.

Date Published: 26 June 2017
PDF: 8 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103294I (26 June 2017); doi: 10.1117/12.2272022

Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)