A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in noncooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm.

Date Published: 26 June 2017
PDF: 7 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103290G (26 June 2017); doi: 10.1117/12.2272003

Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)