Short-coherence in-line phase-shifting digital holographic microscopy based on Michelson interferometer is proposed to measure internal structure in silicon. In the configuration, a short-coherence infrared laser is used as the light source in order to avoid the interference formed by the reference wave and the reflected wave from the front surface of specimen. At the same time, in-line phase-shifting configuration is introduced to overcome the problem of poor resolution and large pixel size of the infrared camera and improve the space bandwidth product of the system. A specimen with staircase structure is measured by using the proposed configuration and the 3D shape distribution are given to verify the effectiveness and accuracy of the method.

Date Published: 13 June 2017
PDF: 6 pages
Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104491F (13 June 2017); doi: 10.1117/12.2270654

Published in SPIE Proceedings Vol. 10449:
Fifth International Conference on Optical and Photonics Engineering
Anand Krishna Asundi, Editor(s)