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Proceedings Paper

Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Author(s): Martin Hammerschmidt; Martin Weiser; Xavier Garcia Santiago; Lin Zschiedrich; Bernd Bodermann; Sven Burger
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Paper Abstract

We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.

Paper Details

Date Published: 26 June 2017
PDF: 10 pages
Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 1033004 (26 June 2017); doi: 10.1117/12.2270596
Show Author Affiliations
Martin Hammerschmidt, JCMwave GmbH (Germany)
Zuse Institute Berlin (ZIB) (Germany)
Martin Weiser, Zuse Institute Berlin (ZIB) (Germany)
Xavier Garcia Santiago, JCMwave GmbH (Germany)
Institut für Festkörperphysik (Germany)
Lin Zschiedrich, JCMwave GmbH (Germany)
Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany)
Sven Burger, JCMwave GmbH (Germany)
Zuse Institute Berlin (ZIB) (Germany)

Published in SPIE Proceedings Vol. 10330:
Modeling Aspects in Optical Metrology VI
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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