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Proceedings Paper

Increasing the accuracy of tilted-wave-interferometry by elimination of systematic errors
Author(s): Johannes Schindler; Christof Pruss; Wolfgang Osten
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Paper Abstract

This work investigates methods to eliminate calibration errors as one of the limiting factors to reduce measurement uncertainty in Tilted-Wave-Interferometry. The correlations between errors in the model parameters and in the measurement result are investigated, taking into account the symmetry of the surface under test. Two schemes for the elimination of such errors are introduced: Rotations around the z-axis allow the removal on non-rotationally symmetric error components. Measurements in lateral shears allow the elimination of calibration errors with higher spatial frequency. The corresponding algorithms and underlying models are explained for both approaches and examples for their application are presented.

Paper Details

Date Published: 26 June 2017
PDF: 10 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032904 (26 June 2017); doi: 10.1117/12.2270395
Show Author Affiliations
Johannes Schindler, Univ. Stuttgart (Germany)
Christof Pruss, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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