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Proceedings Paper

3D interferometric shape measurement technique using coherent fiber bundles
Author(s): Hao Zhang; Robert Kuschmierz; Jürgen Czarske
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Paper Abstract

In-situ 3-D shape measurements with submicron shape uncertainty of fast rotating objects in a cutting lathe are expected, which can be achieved by simultaneous distance and velocity measurements. Conventional tactile methods, coordinate measurement machines, only support ex-situ measurements. Optical measurement techniques such as triangulation and conoscopic holography offer only the distance, so that the absolute diameter cannot be retrieved directly. In comparison, laser Doppler distance sensors (P-LDD sensor) enable simultaneous and in-situ distance and velocity measurements for monitoring the cutting process in a lathe. In order to achieve shape measurement uncertainties below 1 μm, a P-LDD sensor with a dual camera based scattered light detection has been investigated. Coherent fiber bundles (CFB) are employed to forward the scattered light towards cameras. This enables a compact and passive sensor head in the future. Compared with a photo detector based sensor, the dual camera based sensor allows to decrease the measurement uncertainty by the order of one magnitude. As a result, the total shape uncertainty of absolute 3-D shape measurements can be reduced to about 100 nm.

Paper Details

Date Published: 26 June 2017
PDF: 8 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032924 (26 June 2017);
Show Author Affiliations
Hao Zhang, TU Dresden (Germany)
Robert Kuschmierz, TU Dresden (Germany)
Jürgen Czarske, TU Dresden (Germany)

Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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