
Proceedings Paper
Error influences of the shear element in interferometry for form characterization of opticsFormat | Member Price | Non-Member Price |
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Paper Abstract
A shearing interferometer combined with an LED multispot illumination provides a high flexibility form characterization
of optical surfaces as it is needed for aspheres and freeforms. Core element of the setup is the spatial light modulator as
shearing element (SLM). Error influences due to the used blazed grating of the SLM need to be investigated. We show
results of wavefront measurements with a Shack-Hartmann sensor which demonstrate residual structures of the grating at
the wavefront under test. Additionally, simulated data are compared to the measurements to get a better understanding of
the expected effects. These investigations help to correct the wavefront under test for this static error and improve the
accuracy of the form characterisation.
Paper Details
Date Published: 26 June 2017
PDF: 11 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103291T (26 June 2017); doi: 10.1117/12.2269932
Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)
PDF: 11 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103291T (26 June 2017); doi: 10.1117/12.2269932
Show Author Affiliations
Jan-Hendrik Hagemann, Physikalisch-Technische Bundesanstalt (Germany)
Claas Falldorf, Bremer Institut für Angewandte Strahltechnik GmbH (Germany)
Claas Falldorf, Bremer Institut für Angewandte Strahltechnik GmbH (Germany)
Gerd Ehret, Physikalisch-Technische Bundesanstalt (Germany)
Ralf B. Bergmann, Bremer Institut für Angewandte Strahltechnik GmbH (Germany)
Univ. Bremen (Germany)
Ralf B. Bergmann, Bremer Institut für Angewandte Strahltechnik GmbH (Germany)
Univ. Bremen (Germany)
Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)
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