Laser processes of crystalline silicon solar cells become increasingly attractive, because they are fast, accurate and contact-free. Nanosecond and picosecond laser ablations with wavelength of 532nm were performed on the anti-reflection layers deposited on silicon. The laser ablated grooves of AR coatings on monocrystalline and polycrystalline silicon were both characterized to verify the influence on the underlying silicon. And the threshold fluences were specified by contrasting with the corresponding performances under certain laser pulse duration. More importantly, the groove edges were analyzed to further expose the laser ablation mechanism under different laser pulse durations.

Date Published: 1 August 2017
PDF: 8 pages
Proc. SPIE 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers, 103391N (1 August 2017); doi: 10.1117/12.2269681

Published in SPIE Proceedings Vol. 10339:
Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)