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Proceedings Paper

Three-dimensional shape measurement with modal phase measuring deflectometry
Author(s): Lei Huang; Junpeng Xue; Bo Gao; Mourad Idir
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Paper Abstract

Phase Measuring Deflectometry (PMD) is a powerful tool to measure the three-dimensional shape for freeform specular surfaces. In this work, a model based method is applied to PMD, called as Modal Phase Measuring Deflectometry (MPMD). The surface height and slopes are represented in mathematical models and updated by optimizing the model coefficients, in order to minimize the discrepancy between the reprojection in ray tracing and the actual measurement. The pose of the screen relative to the camera is pre-calibrated and then optimized together with the surface shape coefficients. Moreover, the correspondence residuals because of the discrepancies between the modal estimation and practical acquisition are analyzed. Slope residuals are calculated from these discrepancies. Zonal integration methods which are good at dealing with local variations are used to reconstruct the height residual for compensation. Simulations and experiments are conducted to demonstrate the feasibility of the proposed approach.

Paper Details

Date Published: 13 June 2017
PDF: 10 pages
Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 1044909 (13 June 2017); doi: 10.1117/12.2269017
Show Author Affiliations
Lei Huang, Brookhaven National Lab. (United States)
Junpeng Xue, Brookhaven National Lab. (United States)
Sichuan Univ. (China)
Bo Gao, Brookhaven National Lab. (United States)
Shanghai Institute of Applied Physics (China)
Univ. of Chinese Academy of Sciences (China)
Mourad Idir, Brookhaven National Lab. (United States)

Published in SPIE Proceedings Vol. 10449:
Fifth International Conference on Optical and Photonics Engineering
Anand Krishna Asundi, Editor(s)

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