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Proceedings Paper

Decline analysis of vacuum level in ultra high vacuum system
Author(s): Hui Liu; Chang Chen; Feng Shi; Hong-chang Cheng; Sen Niu; Yuan Yuan; Zhuang Miao; Xiao-hui Zhang
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Paper Abstract

Vacuum technology is extensively used in space science, nuclear energy, surface science, materials science, electric vacuum industry, microelectronics, semiconductor, metallurgy, and so on. More and more fields need ultra high vacuum (UHV) or extreme high vacuum (XHV) for scientific research and production. Both the rigorous vacuum processing technics and highly developed sophisticated vacuum technology are the necessities for the acquisition and conservation of UHV or XHV ambience. In this paper, a vacuum decline was analyzed and the UHV system was recovered. Using the residual gas analyzer to measure the partial pressure of residual gas and identify the type of gas, the outgassing source was found out by comparing the measure results. The UHV system was recovered back to 10-9Pa through treatment. The residual gas analyzing method can effectively identify the type of gas about outgassing, narrow the scope of outgassing subassembly, shorten the vacuum system recovery time, and improve work efficiency. The method of determining the outgassing source by residual gas analyzer can be applied in the fields of UHV and XHV, and it has a certain reference significance for further improving the system vacuum degree.

Paper Details

Date Published: 8 March 2017
PDF: 5 pages
Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102554N (8 March 2017); doi: 10.1117/12.2268400
Show Author Affiliations
Hui Liu, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)
Chang Chen, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)
Feng Shi, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)
Hong-chang Cheng, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)
Sen Niu, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)
Yuan Yuan, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)
Zhuang Miao, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)
Xiao-hui Zhang, Science and Technology on Low-Light-Level Night Vision Lab. (China)
North Night Vision Technology Co., Ltd. (China)


Published in SPIE Proceedings Vol. 10255:
Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016
Yueguang Lv; Jialing Le; Hesheng Chen; Jianyu Wang; Jianda Shao, Editor(s)

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