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Proceedings Paper

Geometrical error calibration in reflective surface testing based on reverse Hartmann test
Author(s): Zhidong Gong; Daodang Wang; Ping Xu; Chao Wang; Rongguang Liang; Ming Kong; Jun Zhao; Linhai Mo; Shuhui Mo
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Paper Abstract

In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.

Paper Details

Date Published: 23 August 2017
PDF: 9 pages
Proc. SPIE 10373, Applied Optical Metrology II, 103730K (23 August 2017); doi: 10.1117/12.2268372
Show Author Affiliations
Zhidong Gong, China Jiliang Univ. (China)
Daodang Wang, China Jiliang Univ. (China)
Ping Xu, China Jiliang Univ. (China)
Chao Wang, China Jiliang Univ. (China)
Rongguang Liang, College of Optical Sciences, The Univ. of Arizona (United States)
Ming Kong, China Jiliang Univ. (China)
Jun Zhao, China Jiliang Univ. (China)
Linhai Mo, Volkslift Co. Ltd. (China)
Shuhui Mo, Volkslift Co. Ltd. (China)

Published in SPIE Proceedings Vol. 10373:
Applied Optical Metrology II
Erik Novak; James D. Trolinger, Editor(s)

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