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Proceedings Paper

Effects of isolation trench depth on bulk integrated quenching resistors and breakdown voltage of the silicon photomultiplier with bulk integrated quenching resistors
Author(s): Ru Yang; Hesheng Tan; Rongdan Liu; Ran He; Kun Liang; Dejun Han
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Paper Abstract

Much attention has been paid to silicon photomultiplier (SiPM) for single photon resolution. The New Devices Laboratory, Beijing Normal University developed a SiPM with bulk integrated quenching resistors, which has simple, compact structure, can achieve high dynamic range. This paper presents a bulk resistor type SiPM with trenches isolation. The effects of the trench depth on quenching bulk resistors and breakdown voltage are studied by simulation. The bulk quenching resistors and breakdown voltage can be adjusted by the depth of the isolation trench when the wafer resistivity is high. The results are important for the design of the bulk resistors quenching SiPM.

Paper Details

Date Published: 8 March 2017
PDF: 6 pages
Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102554B (8 March 2017); doi: 10.1117/12.2268316
Show Author Affiliations
Ru Yang, Beijing Normal Univ. (China)
Hesheng Tan, Beijing Normal Univ. (China)
Rongdan Liu, Beijing Normal Univ. (China)
Ran He, Beijing Normal Univ. (China)
Kun Liang, Beijing Normal Univ. (China)
Dejun Han, Beijing Normal Univ. (China)


Published in SPIE Proceedings Vol. 10255:
Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016
Yueguang Lv; Jialing Le; Hesheng Chen; Jianyu Wang; Jianda Shao, Editor(s)

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