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Proceedings Paper

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer
Author(s): Daodang Wang; Zhichao Wang; Rongguang Liang; Ming Kong; Jun Zhao; Jufeng Zhao; Linhai Mo; Wei Li
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Paper Abstract

The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10-4λ (the wavelength λ is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (~90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.

Paper Details

Date Published: 26 June 2017
PDF: 8 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032937 (26 June 2017); doi: 10.1117/12.2268052
Show Author Affiliations
Daodang Wang, Zhejiang Univ. (China)
China Jiliang Univ. (China)
Zhichao Wang, China Jiliang Univ. (China)
Rongguang Liang, College of Optical Sciences, The Univ. of Arizona (United States)
Ming Kong, China Jiliang Univ. (China)
Jun Zhao, China Jiliang Univ. (China)
Jufeng Zhao, Hangzhou Dianzi Univ. (China)
Linhai Mo, Volkslift (China) Co. Ltd. (China)
Wei Li, China Jiliang Univ. (China)

Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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