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Proceedings Paper • Open Access

MEMS microphone innovations towards high signal to noise ratios (Conference Presentation)
Author(s): Alfons Dehé

Paper Abstract

After decades of research and more than ten years of successful production in very high volumes Silicon MEMS microphones are mature and unbeatable in form factor and robustness. Audio applications such as video, noise cancellation and speech recognition are key differentiators in smart phones. Microphones with low self-noise enable those functions. Backplate-free microphones enter the signal to noise ratios above 70dB(A). This talk will describe state of the art MEMS technology of Infineon Technologies. An outlook on future technologies such as the comb sensor microphone will be given.

Paper Details

Date Published: 16 June 2017
PDF: 1 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024602 (16 June 2017); doi: 10.1117/12.2267872
Show Author Affiliations
Alfons Dehé, Infineon Technologies AG (Germany)

Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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