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Proceedings Paper

Experimental light scattering by small particles: first results with a novel Mueller matrix scatterometer
Author(s): Antti Penttilä; Göran Maconi; Ivan Kassamakov; Maria Gritsevich; Petteri Helander; Tuomas Puranen; Edward Hæggström; Karri Muinonen
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Paper Abstract

We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to μm-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

Paper Details

Date Published: 26 June 2017
PDF: 7 pages
Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 103300A (26 June 2017); doi: 10.1117/12.2267863
Show Author Affiliations
Antti Penttilä, Univ. of Helsinki (Finland)
Göran Maconi, Univ. of Helsinki (Finland)
Ivan Kassamakov, Univ. of Helsinki (Finland)
Maria Gritsevich, Univ. of Helsinki (Finland)
Petteri Helander, Univ. of Helsinki (Finland)
Tuomas Puranen, Univ. of Helsinki (Finland)
Edward Hæggström, Univ. of Helsinki (Finland)
Karri Muinonen, Univ. of Helsinki (Finland)
Finnish Geospatial Research Institute (Finland)

Published in SPIE Proceedings Vol. 10330:
Modeling Aspects in Optical Metrology VI
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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