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Proceedings Paper

Development of atmospheric pressure plasma torch for the fabrication of freeform optics
Author(s): Xing Su; Qiang Xin; Yuanhang Liu; Longguang Xia; Bo Wang
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Paper Abstract

Freeform optics especially Continues Phase Plate, are greatly demanded in high power laser systems. Fabrication of them with high efficiency and low sub-surface damage becomes a major challenge. Atmospheric pressure plasma processing using radicals produced by plasma torch, which has strong potential for machining freeform optics with millimeter and sub-millimeter spatial resolution, is proposed. This paper presents a novel plasma torch designed for fabricating freeform optics. This integral compact torch is comprised of needle electrode and micro-hole electrode. Millimeter-scale plasma jet of different size can be obtained by changing the micro-hole electrode. To analyze the process distribution of process gas of the jet flow, flow simulation is performed using COMSOL Multiphysics software. A set of single factor experiments are conducted to reveal the relationship between removal characteristics and flow rate of He, CF4 and O2. The removal rate with adding O2 increases 7 times of that without O2, and the spectrum change of the plasma jet is observed. It indicates that O2 improves removal rate through consuming existing CFx to produce more F radicals. The removal rate and full width at half maximum (FWHM) of typical removal function is about 19 μm/min-2.2 mm and 18 μm/min-1.1 mm respectively.

Paper Details

Date Published: 8 March 2017
PDF: 6 pages
Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102550P (8 March 2017); doi: 10.1117/12.2267633
Show Author Affiliations
Xing Su, Harbin Institute of Technology (China)
Qiang Xin, Harbin Institute of Technology (China)
Yuanhang Liu, Harbin Institute of Technology (China)
Longguang Xia, Harbin Institute of Technology (China)
Bo Wang, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 10255:
Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016
Yueguang Lv; Jialing Le; Hesheng Chen; Jianyu Wang; Jianda Shao, Editor(s)

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