By methods of hard X-ray diffraction (λ=0.154 nm) and scanning electron microscopy the surface morphology of Sc/Si multilayer mirrors influenced with nanosecond pulses of discharge capillary laser (λ=46.9 nm) is studied. Under irradiation a relief of periodically alternating valleys and ridges is formed. The region of observed relief is extended over the space being ~10⁴ greater than the irradiated region. Periodic relief (periodicity of 2.2-2.3 μm) appears as a result of reaction between Sc and Si layers making valleys (Sc₃Si₅ silicide) and ridges (ScSi monosilicide). Each of periods has complex structure exactly repeated in neighbor periods. Mechanisms of periodic relief formation are discussed.

Date Published: 15 May 2017
PDF: 9 pages
Proc. SPIE 10236, Damage to VUV, EUV, and X-ray Optics VI, 102360J (15 May 2017); doi: 10.1117/12.2267292

Published in SPIE Proceedings Vol. 10236:
Damage to VUV, EUV, and X-ray Optics VI
Libor Juha; Saša Bajt; Regina Soufli, Editor(s)