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Proceedings Paper

Study on light scattering characterization for subsurface defect of optical element
Author(s): Ailing Tian; Yingge Zhang; Yujun Tian; Chunhui Wang; Chunyang Wang
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Paper Abstract

Aiming at the effect of converge laser light scattering caused by subsurface micro-defect, and the change rule of laser scattering modulation was studied. First, the geometry model is built by defect type; then, by finite element method based on electromagnetic theory, the scattering light intensity distribution and variation curve with different detection defect depth, which convergence light spot focus on, were researched by numerical simulation. Finally, simulation model was verified by comparing experiment. This research results are important to setup the mathematical relation between subsurface defect and light scattering, and realize quantitative detection for the subsurface defect of optical element.

Paper Details

Date Published: 10 February 2017
PDF: 7 pages
Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 1025014 (10 February 2017); doi: 10.1117/12.2267275
Show Author Affiliations
Ailing Tian, Xi'an Technological Univ. (China)
Yingge Zhang, Xi'an Technological Univ. (China)
Yujun Tian, Xi'an Technological Univ. (China)
Chunhui Wang, Xi'an Technological Univ. (China)
Chunyang Wang, Changchun Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 10250:
International Conference on Optical and Photonics Engineering (icOPEN 2016)
Anand Krishna Asundi; Xiyan Huang; Yi Xie, Editor(s)

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