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Proceedings Paper

Experimental research of dynamic stitching interferometry for large plano optics
Author(s): Xin Wu; Te Qi; Yingjie Yu
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Paper Abstract

Stitching interferometry is an effective method to extend the measurement range of commercial interferometer. It has been applied in the laboratorial environment, but rarely in workshop. In order to improve the testing efficiency in workshop, stitching interferometry could be combined with machine tool and implement in-situ testing. A dynamic stitching interferometer system is established in this paper, which contains dynamic interferometry, precision motion control and advanced stitching algorithm. This system has been prepared for the in-situ testing of large plano optics. One example optical flat with size 200mm×300mm was used to verify the feasibility and accuracy of this system. Many repetitive experiments have been proved the well reliability of the system and method.

Paper Details

Date Published: 10 February 2017
PDF: 4 pages
Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 102500A (10 February 2017); doi: 10.1117/12.2266722
Show Author Affiliations
Xin Wu, Shanghai Univ. (China)
Te Qi, Shanghai Univ. (China)
Yingjie Yu, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 10250:
International Conference on Optical and Photonics Engineering (icOPEN 2016)
Anand Krishna Asundi; Xiyan Huang; Yi Xie, Editor(s)

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