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Proceedings Paper

Highly sensitive devices for primary signal processing of the micromechanical capacitive transducers
Author(s): B. Konoplev; E. Ryndin; I. Lysenko; M. Denisenko; A. Isaeva
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Paper Abstract

A method of signal processing devices design for micromechanical accelerometers with capacitive transducers is proposed. This method provides the complex solution of the sensibility increasing and noise immunity problems by finding of the difference frequency of signals, which are formed by two identical generators with micromechanical capacitive transducers in frequency control circuits. In this study the analog and digital versions of the highly sensitive signal processing devices circuits with frequency output were developed. The breadboards of these devices are fabricated and studied and the project of their integral realization is designed.

Paper Details

Date Published: 30 December 2016
PDF: 7 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241E (30 December 2016); doi: 10.1117/12.2266562
Show Author Affiliations
B. Konoplev, Southern Federal Univ. (Russian Federation)
E. Ryndin, Southern Federal Univ. (Russian Federation)
I. Lysenko, Southern Federal Univ. (Russian Federation)
M. Denisenko, Southern Federal Univ. (Russian Federation)
A. Isaeva, Southern Federal Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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