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Proceedings Paper

Optical coefficients of nanometer-thick copper and gold films in microwave frequency range
Author(s): I. Khorin; N. Orlikovsky; A. Rogozhin; A. Tatarintsev; S. Pronin; V. Andreev; V. Vdovin
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Paper Abstract

Ultrathin (1–10 nm) Cu and Au films were prepared on the silicon and quartz substrates by magnetron sputtering at room temperature. We measured the transmission coefficient of the films at a wavelength of 3cm and analyzed a surface morphology of these films. It was shown that the films with thicknesses less than 7.5 nm (Au) and 3 nm (Cu) are almost transparent for microwaves. This effect is explained by quick oxidation of Cu and the complex surface morphology of nanometer thick films. The Au film morphology is evolved with increasing average Au thickness d from hemispherical islands initially (1.0 nm<d<5.0 nm) to partially coalesced worm-like island structures (d=10 nm).

Paper Details

Date Published: 30 December 2016
PDF: 7 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 1022407 (30 December 2016); doi: 10.1117/12.2266504
Show Author Affiliations
I. Khorin, Institute of Physics and Technology (Russian Federation)
Moscow Technological Univ. (MIREA) (Russian Federation)
N. Orlikovsky, Institute of Physics and Technology (Russian Federation)
A. Rogozhin, Institute of Physics and Technology (Russian Federation)
A. Tatarintsev, Institute of Physics and Technology (Russian Federation)
S. Pronin, Moscow State Univ. (Russian Federation)
V. Andreev, Moscow State Univ. (Russian Federation)
V. Vdovin, Kotel’nikov Institute of Radio Engineering and Electronics (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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