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Proceedings Paper

In-line quality control of micro parts using digital holography
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Paper Abstract

We demonstrate a digital holographic system for the fast inspection of the interior of micro parts, which is capable of working in an industrial environment. We investigate micro objects using Two-Wavelength-Contouring with a synthetic wavelength of approximately 90 μm. Special consideration is given to the mechanical robustness of the system. A compact Michelson-setup in front of the imaging optics increases the robustness for the measurement as the light paths of the object and reference have almost a common path. We also implement the Two-Frame Phase Shifting method for the recording of a complex wavefield. The use of two cameras for different polarized states for the object- and reference wave allows the recording of a complex wavefield in a single exposure per wavelength. The setup allows determining the shape of the interior surface of the object and faults such as scratches with a measurement uncertainty of approximately 5 μm.

Paper Details

Date Published: 15 May 2017
PDF: 7 pages
Proc. SPIE 10233, Holography: Advances and Modern Trends V, 1023311 (15 May 2017); doi: 10.1117/12.2265780
Show Author Affiliations
Aleksandar Simic, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Hendrik Freiheit, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Mostafa Agour, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Aswan Univ. (Egypt)
Claas Falldorf, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Ralf B. Bergmann, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Univ. Bremen (Germany)


Published in SPIE Proceedings Vol. 10233:
Holography: Advances and Modern Trends V
Miroslav Hrabovský; John T. Sheridan; Antonio Fimia, Editor(s)

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