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Proceedings Paper

Development of depth-graded W/Si multilayer mirrors for x-ray focusing telescope application
Author(s): Runze Qi; Qiushi Huang; Yang Yang; Zhong Zhang; Zhanshan Wang
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Paper Abstract

X-ray Timing and Polarization (XTP) telescope is proposed in China, by using the nested Wolter-I type optical system with large effective area, for the study of high energy physics at the region of 1-30 keV. High reflectance and low stress W/Si multilayers are demanded in the telescope to fulfill the spectral response and ensure the figure quality of the mirrors at the same time. A dedicated cylindrical deposition facility based on direct current magnetron sputtering technique was developed. Using this facility, W/Si multilayers fabricated under different base pressure and working pressure were tested to optimize the sputtering process. The microstructure and stress of W/Si multilayers with different d-spacing (d=2.0 nm-7.0 nm) and thickness ratio of W (ϒw=0.3-0.7) were studied. In order to obtain low stress multilayer mirrors, post-deposition annealing was applied on the multilayers and both the effects of temperature and annealing time were studied. Based on these works, a depth-graded W/Si multilayer was deposited on thin cylindrical mirror and the X-ray reflectivity was measured at Beijing Synchrotron Radiation Facility (BSRF).

Paper Details

Date Published: 31 May 2017
PDF: 8 pages
Proc. SPIE 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V, 102350G (31 May 2017); doi: 10.1117/12.2265752
Show Author Affiliations
Runze Qi, Tongji Univ. (China)
Qiushi Huang, Tongji Univ. (China)
Yang Yang, Tongji Univ. (China)
Zhong Zhang, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 10235:
EUV and X-ray Optics: Synergy between Laboratory and Space V
René Hudec; Ladislav Pina, Editor(s)

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