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Proceedings Paper

Alkaline fuel cell with nitride membrane
Author(s): Shen-Huei Sun; Moritz Pilaski; Jens Wartmann; Florian Letzkus; Benedikt Funke; Georg Dura; Angelika Heinzel
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Paper Abstract

The aim of this work is to fabricate patterned nitride membranes with Si-MEMS-technology as a platform to build up new membrane-electrode-assemblies (MEA) for alkaline fuel cell applications. Two 6-inch wafer processes based on chemical vapor deposition (CVD) were developed for the fabrication of separated nitride membranes with a nitride thickness up to 1 μm. The mechanical stability of the perforated nitride membrane has been adjusted in both processes either by embedding of subsequent ion implantation step or by optimizing the deposition process parameters. A nearly 100% yield of separated membranes of each deposition process was achieved with layer thickness from 150 nm to 1 μm and micro-channel pattern width of 1μm at a pitch of 3 μm. The process for membrane coating with electrolyte materials could be verified to build up MEA. Uniform membrane coating with channel filling was achieved after the optimization of speed controlled dip-coating method and the selection of dimethylsulfoxide (DMSO) as electrolyte solvent. Finally, silver as conductive material was defined for printing a conductive layer onto the MEA by Ink-Technology. With the established IR-thermography setup, characterizations of MEAs in terms of catalytic conversion were performed successfully. The results of this work show promise for build up a platform on wafer-level for high throughput experiments.

Paper Details

Date Published: 2 June 2017
PDF: 8 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460T (2 June 2017); doi: 10.1117/12.2265689
Show Author Affiliations
Shen-Huei Sun, Institut für Mikroelektronik Stuttgart (Germany)
Moritz Pilaski, ZBT GmbH (Germany)
Jens Wartmann, ZBT GmbH (Germany)
Florian Letzkus, Institut für Mikroelektronik Stuttgart (Germany)
Benedikt Funke, ZBT GmbH (Germany)
Georg Dura, ZBT GmbH (Germany)
Angelika Heinzel, ZBT GmbH (Germany)

Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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