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Proceedings Paper

A multi-functional MEMS-SPM for quantitative characterization of nano-objects
Author(s): Zhi Li; Sai Gao; Uwe Brand; Karla Hiller; Nicole Wollschläger; Xianghui Zhang
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Paper Abstract

Based upon the micro-fabrication technology, a series of MEMS scanning probe microscopes (MEMS-SPM) have been developed in the national metrology institute Physikalisch-Technische Bundesanstalt (PTB) in Braunschweig. In comparison with those traditional AFMs, the MEMS-SPM features generally a vertical deflection up to 10 μm with a resolution of 0.2 nm, a non-linearity less than 0.03%, and a testing force up to several hundreds of μN with a force resolution down to 1 nN by means of a capacitive displacement sensing technique. As a result, these MEMS-SPMs can be successfully applied in the field of nanodimensional and nanomechanical metrology. Mechanical design of the MEMS-SPM is reported in this manuscript. Proof-of-principle measurements using a prototype of the MEMS-SPM are detailed in this manuscript, verifying the capabilities of the MEMS-SPM.

Paper Details

Date Published: 7 June 2017
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460J (7 June 2017); doi: 10.1117/12.2265680
Show Author Affiliations
Zhi Li, Physikalisch-Technische Bundesanstalt (Germany)
Sai Gao, Physikalisch-Technische Bundesanstalt (Germany)
Uwe Brand, Physikalisch-Technische Bundesanstalt (Germany)
Karla Hiller, Technische Univ. Chemnitz (Germany)
Nicole Wollschläger, Bundesanstalt für Materialforschung und -Prüfung (Germany)
Xianghui Zhang, Univ. Bielefeld (Germany)

Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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