Share Email Print

Proceedings Paper

Experimental analysis of silicon oxycarbide thin films and waveguides
Author(s): Faisal Ahmed Memon; Francesco Morichetti; Claudio Somaschini; Giosue Iseni; Andrea Melloni
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Silicon oxycarbide (SiOC) thin films are produced with reactive rf magnetron sputtering of a silicon carbide (SiC) target on Si (100) and SiO2/Si substrates under varying deposition conditions. The optical properties of the deposited SiOC thin films are characterized with spectroscopic ellispometry at multiple angles of incidence over a wavelength range 300- 1600 nm. The derived optical constants of the SiOC films are modeled with Tauc-Lorentz model. The refractive index n of the SiOC films range from 1.45 to 1.85 @ 1550 nm and the extinction coefficient k is estimated to be less than 10-4 in the near-infrared region above 1000 nm. The topography of SiOC films is studied with SEM and AFM giving rms roughness of 0.9 nm. Channel waveguides with a SiOC core with a refractive index of 1.7 have been fabricated to demonstrate the potential of sputtered SiOC for integrated photonics applications. Propagation loss as low as 0.39 ± 0.05 dB/mm for TE and 0.41 ± 0.05 dB/mm for TM polarizations at telecommunication wavelength 1550 nm is demonstrated.

Paper Details

Date Published: 17 May 2017
PDF: 7 pages
Proc. SPIE 10242, Integrated Optics: Physics and Simulations III, 1024212 (17 May 2017); doi: 10.1117/12.2265309
Show Author Affiliations
Faisal Ahmed Memon, Politecnico di Milano (Italy)
Mehran Univ. of Engineering & Technology (Pakistan)
Francesco Morichetti, Mehran Univ. of Engineering & Technology (Pakistan)
Claudio Somaschini, Politecnico di Milano (Italy)
Giosue Iseni, Politecnico di Milano (Italy)
Andrea Melloni, Politecnico di Milano (Italy)

Published in SPIE Proceedings Vol. 10242:
Integrated Optics: Physics and Simulations III
Pavel Cheben; Jiří Čtyroký; Iñigo Molina-Fernández, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?