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Proceedings Paper

A method of measuring the velocity of slit based on machine vision
Author(s): Man Chen; Zhijie Liao
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Paper Abstract

In the lithography machine, there is a field diaphragm, which is a kind of edge structure. In the process of exposure, it is linearly synchronous movement with the die, so when developing the slit, it is necessary to measure its movement characteristics precisely. A method of velocity measurement based on machine vision is adopted, by detecting edge position in sequential images, and then through the transformation between image coordinate and world coordinate, the object displacement in real space is calculated and finally instantaneous velocity of the object is got. Firstly, through the simulation model in CODE V, correctness of the measurement principle is verified, Next, some error sources that affect the precision of the machine vision measurement system are analyzed, and corresponding solutions are given.

Paper Details

Date Published: 23 January 2017
PDF: 9 pages
Proc. SPIE 10322, Seventh International Conference on Electronics and Information Engineering, 103222U (23 January 2017); doi: 10.1117/12.2265250
Show Author Affiliations
Man Chen, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Zhijie Liao, Institute of Optics and Electronics (China)

Published in SPIE Proceedings Vol. 10322:
Seventh International Conference on Electronics and Information Engineering
Xiyuan Chen, Editor(s)

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