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Proceedings Paper

Soft x-ray imaging with incoherent sources
Author(s): P. Wachulak; A. Torrisi; M. Ayele; A. Bartnik; J. Czwartos; Ł. Węgrzyński; T. Fok; T. Parkman; Š. Vondrová; J. Turnová; M. Odstrcil; H. Fiedorowicz
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Paper Abstract

In this work we present experimental, compact desk-top SXR microscope, the EUV microscope which is at this stage a technology demonstrator, and finally, the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources, employing a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths, respectively, are capable of imaging nanostructures with a sub-50 nm spatial resolution with relatively short (seconds) exposure times. The SXR contact microscope operates in the “water-window” spectral range, to produce an imprint of the internal structure of the sample in a thin layer of SXR light sensitive photoresist. Applications of such desk-top EUV and SXR microscopes for studies of variety of different samples – test objects for resolution assessment and other objects such as carbon membranes, DNA plasmid samples, organic and inorganic thin layers, diatoms, algae and carcinoma cells, are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.

Paper Details

Date Published: 17 May 2017
PDF: 9 pages
Proc. SPIE 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications, 102430O (17 May 2017); doi: 10.1117/12.2265093
Show Author Affiliations
P. Wachulak, Military Univ. of Technology (Poland)
A. Torrisi, Military Univ. of Technology (Poland)
M. Ayele, Military Univ. of Technology (Poland)
A. Bartnik, Military Univ. of Technology (Poland)
J. Czwartos, Military Univ. of Technology (Poland)
Ł. Węgrzyński, Military Univ. of Technology (Poland)
T. Fok, Military Univ. of Technology (Poland)
T. Parkman, Czech Technical Univ. in Prague (Czech Republic)
Š. Vondrová, Czech Technical Univ. in Prague (Czech Republic)
J. Turnová, Czech Technical Univ. in Prague (Czech Republic)
M. Odstrcil, Paul Scherrer Institut (Switzerland)
H. Fiedorowicz, Military Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 10243:
X-ray Lasers and Coherent X-ray Sources: Development and Applications
Annie Klisnick; Carmen S. Menoni, Editor(s)

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