Cu-based micro-temperature sensors were directly fabricated on poly(dimethylsiloxane) (PDMS) blood vessel models in EVE using a combined process of spray coating and femtosecond laser reduction of CuO nanoparticles. CuO nanoparticle solution coated on a PDMS blood vessel model are thermally reduced and sintered by focused femtosecond laser pulses in atmosphere to write the sensors. After removing the non-irradiated CuO nanoparticles, Cu-based microtemperature sensors are formed. The sensors are thermistor-type ones whose temperature dependences of the resistance are used for measuring temperature inside the blood vessel model. This fabrication technique is useful for direct-writing of Cu-based microsensors and actuators on arbitrary nonplanar substrates.

Date Published: 17 April 2017
PDF: 7 pages
Proc. SPIE 10167, Nanosensors, Biosensors, Info-Tech Sensors and 3D Systems 2017, 101670Z (17 April 2017); doi: 10.1117/12.2265050

Published in SPIE Proceedings Vol. 10167:
Nanosensors, Biosensors, Info-Tech Sensors and 3D Systems 2017
Vijay K. Varadan, Editor(s)