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Proceedings Paper

On-machine metrology system (Conference Presentation)
Author(s): Hsiang Nan Cheng; Katherine Overend; Yu Zhang; Rongguang Liang

Paper Abstract

Diamond turning is the powerful fabrication method for optics. Current process is very time consuming due to the lack of on-machine metrology. In this talk, we will first discuss the challenges and requirement of in-situ metrology, then we will present chromatic confocal on-machine metrology system developed in our lab and demonstrate its performance.

Paper Details

Date Published: 6 June 2017
PDF: 1 pages
Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 102200G (6 June 2017); doi: 10.1117/12.2264882
Show Author Affiliations
Hsiang Nan Cheng, College of Optical Sciences, The Univ. of Arizona (United States)
Katherine Overend, College of Optical Sciences, The Univ. of Arizona (United States)
Yu Zhang, College of Optical Sciences, The Univ. of Arizona (United States)
Rongguang Liang, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 10220:
Dimensional Optical Metrology and Inspection for Practical Applications VI
Kevin G. Harding; Song Zhang, Editor(s)

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