Proceedings Paper
Programmable differential capacitance-to-voltage converter for MEMS accelerometers| Format | Member Price | Non-Member Price |
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Paper Abstract
Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.
Paper Details
Date Published: 31 May 2017
PDF: 8 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024610 (31 May 2017); doi: 10.1117/12.2264784
Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)
PDF: 8 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024610 (31 May 2017); doi: 10.1117/12.2264784
Show Author Affiliations
G. Royo, Univ. de Zaragoza (Spain)
C. Sánchez-Azqueta, Univ. de Zaragoza (Spain)
C. Gimeno, Univ. Catholique de Louvain (Belgium)
C. Sánchez-Azqueta, Univ. de Zaragoza (Spain)
C. Gimeno, Univ. Catholique de Louvain (Belgium)
C. Aldea, Univ. de Zaragoza (Spain)
S. Celma, Univ. de Zaragoza (Spain)
S. Celma, Univ. de Zaragoza (Spain)
Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)
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