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Proceedings Paper

Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems
Author(s): V. D. Paranin; S. N. Khonina
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Paper Abstract

The electro-optical element for converting of zero-order and second-order Bessel laser beams based on strontium – barium niobate crystal has been developed. The theoretical research of electrically tunable beam switching has been carried out for various diffractive axicons with periods 1.3 μm, 2 μm, 4 μm and a crystal with 9.7 mm length. The research showed maximum sensitivity of output beam intensity for axicon period 1.3 μm. The calculated switching voltage for this case was about 800 V.

Paper Details

Date Published: 30 December 2016
PDF: 5 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241M (30 December 2016); doi: 10.1117/12.2264691
Show Author Affiliations
V. D. Paranin, Samara National Research Univ. (Russian Federation)
S. N. Khonina, Samara National Research Univ. (Russian Federation)
IPSI RAS - Branch of the FSRC (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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