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Proceedings Paper

A miniaturized ferrule-top optical cantilever for vibration measurement
Author(s): J. Li; S. M. Xu; J. N. Sun; Y. Q. Tang; F. Z. Dong
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Paper Abstract

In this paper, we propose techniques to design and fabricate polymer micro-cantilevers for attachment onto the end of standard single mode fibers using laser machining. The polymer cantilever is fabricated by laser micro-machining a sheet of polymer into the required shape and then bonded onto the top of a ceramic ferrule by photo resist as a flat supporting and bonding layer. The dimension of resulting cantilever is ~1.2 mm long, ~300 μm wide, and 25 μm thick. In this work we describe the fabrication of single sensors, however the process could be scaled to offer a route towards mass production. Cantilever vibration caused by vibration signal are monitored by a DFB laser based phase interrogation system. Proof-of-concept experiments show that the sensor is capable of detecting vibration signal with a frequency range of 0-800Hz. By using thinner polymer sheet and machining longer cantilever, the frequency response range can be extended up to a few kHz.

Paper Details

Date Published: 23 April 2017
PDF: 4 pages
Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 103232X (23 April 2017); doi: 10.1117/12.2263956
Show Author Affiliations
J. Li, Anhui Institute of Optics and Fine Mechanics (China)
S. M. Xu, Anhui Institute of Optics and Fine Mechanics (China)
J. N. Sun, Heriot-Watt Univ. (United Kingdom)
Y. Q. Tang, Anhui Institute of Optics and Fine Mechanics (China)
F. Z. Dong, Anhui Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 10323:
25th International Conference on Optical Fiber Sensors
Youngjoo Chung; Wei Jin; Byoungho Lee; John Canning; Kentaro Nakamura; Libo Yuan, Editor(s)

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