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Proceedings Paper

Absolute and relative surface profile interferometry using multiple frequency-scanned lasers
Author(s): Marek Peca; Pavel Psota; Petr Vojtíšek; Vít Lédl
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Paper Abstract

An interferometer has been used to measure the surface profile of generic object. Frequency scanning interferometry has been employed to provide unambiguous phase readings, to suppress etalon fringes, and to supersede phase-shifting. The frequency scan has been performed in three narrow wavelength bands, each generated by a temperature tuned laser diode. It is shown, that for certain portions of measured object, it was possible to get absolute phase measurement, counting all wave periods from the point of zero path difference, yielding precision of 2.7nm RMS over 11.75mm total path difference. For the other areas where steep slopes were present in object geometry, a relative measurement is still possible, at measured surface roughness comparable to that of machining process (the same 2.7nm RMS). It is concluded, that areas containing steep slopes exhibit systematic error, attributed to a combined factors of dispersion and retrace error.

Paper Details

Date Published: 11 November 2016
PDF: 10 pages
Proc. SPIE 10151, Optics and Measurement International Conference 2016, 101510H (11 November 2016); doi: 10.1117/12.2263656
Show Author Affiliations
Marek Peca, Eltvor (Czech Republic)
Pavel Psota, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
Petr Vojtíšek, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
Vít Lédl, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)

Published in SPIE Proceedings Vol. 10151:
Optics and Measurement International Conference 2016
Jana Kovacicinova, Editor(s)

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