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Proceedings Paper

Infrared wire-grid polarizer with sol-gel zirconia grating
Author(s): Itsunari Yamada; Yoshiro Ishihara
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Paper Abstract

The infrared wire-grid polarizer consisting of an Al grating, Si, and sol-gel derived zirconia grating film was fabricated by soft imprint process and Al shadow coating processes. A silicone mold was used because of its low surface energy, flexibility, and capability of transferring submicrosized patterns. As a result, the Al grating with a pitch of 400 nm and a depth of 100 nm was obtained on the zirconia grating film. The fabricated polarizer exhibited a polarization function with the TM transmittance greater than that of the Si substrate in the specific wavelength range of 3.6–8.5 μm, because the zirconia film acted as an antireflection film. The maximum value was 63% at a wavelength of 5.2 μm. This increment of the TM transmission spectrum results in interference within the zirconia film. Also, the extinction ratio exceeded almost 20 dB in the 3-8.8 μm wavelength range.

Paper Details

Date Published: 30 May 2017
PDF: 7 pages
Proc. SPIE 10249, Integrated Photonics: Materials, Devices, and Applications IV, 102490P (30 May 2017); doi: 10.1117/12.2263544
Show Author Affiliations
Itsunari Yamada, Univ. of Shiga Prefecture (Japan)
Yoshiro Ishihara, Univ. of Shiga Prefecture (Japan)

Published in SPIE Proceedings Vol. 10249:
Integrated Photonics: Materials, Devices, and Applications IV
Jean-Marc Fédéli; Laurent Vivien, Editor(s)

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