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Proceedings Paper

Low-frequency roughness mitigation on N7/N5 fin patterning (Conference Presentation)

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Date Published: 27 April 2017
PDF: 1 pages
Proc. SPIE 10149, Advanced Etch Technology for Nanopatterning VI, 101490A (27 April 2017); doi: 10.1117/12.2263468
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Published in SPIE Proceedings Vol. 10149:
Advanced Etch Technology for Nanopatterning VI
Sebastian U. Engelmann, Editor(s)

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